Optics in Semiconductor

Optics Matter In Semiconductor Industry

In the dynamic realm of semiconductor manufacturing, precision optical systems are pivotal, particularly in semiconductor lithography and inspection. As the industry embraces ever-shrinking feature sizes with increased design intricacy, cutting-edge inspection tools become paramount. These tools demand precision-customized optics, like microscope objectives, to construct diverse optical subsystems crucial for lithography machine process control and semiconductor inspection equipment quality control.

The optical system’s role in lithography machines directly influences resolution, process speed, and chip yield, ensuring the preparation of highly integrated, high-resolution chips. In semiconductor inspection, optical systems play a vital role in detecting and measuring wafer surfaces or circuit structures, ensuring flawless execution of processes and averting fatal defects. Optical detection technology, with its high speed, sensitivity, and wide applicability, is extensively employed in semiconductor detection equipment.

Services and Solutions in Semiconductor

Collaborating closely with our clients, we specialize in crafting tailor-made spherical and aspherical surfaces renowned for high resolution, spanning from 400nm to 2.4μm. These optics excel in various inspection techniques, including dark/brightfield, fluorescence, and photoluminescence, among others, implemented on cutting-edge wafer inspection and metrology systems. Our partnership model is designed to expedite both product and process development, ensuring that time-sensitive projects adhere to schedules and budgets. This collaborative approach empowers our clients to be pioneers in introducing industry-leading solutions to the market.

Large spherical optics for wafer inspection
High-resolution microscope objectives and lenses
Precision cylindrical lenses for manufacturing high-throughput inspection tools

Precision Optics Seen In Semiconductor

Lithography Machine Illumination System

The illumination system of the lithography machine is an important component, used to generate high-quality ultraviolet or visible light beams to transfer the chip pattern to the chip surface through the mask.

Lithography Machine Mask

In the lithography machine, the mask is placed in the projection optical system of the lithography machine, and the light is controlled to pass through the chip pattern on the mask to form a micron-level chip structure.

Lithography Machine Projection Optical System

The projection optical system of the lithography machine is one of the important parts of chip manufacturing. It transfers the chip pattern on the mask to the chip surface through optical imaging.

Lithography Machine Control System

It is mainly used to control the various movements of the lithography machine, the setting and adjustment of lithography parameters, etc., to achieve precise control of chip processing.